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The Processing and Properties of Al-doped ZnO Thin Film with Dispersion of Fine Au and Ag Particles

林永仁

  In this research,AZO(Al-doped ZnO) films are fabricated by sol-gel method and spin coating on glass substrate.The optimal dopant concentration and annealing conditions are obtained by evaluating the electrical conductivity and optical transmittance of the films.Once the optimal condition is known for AZO films,AZO-metal particle composite films are prepared by depositing Au and Ag fine particles on the glass, which are achieved by heating of the corresponding metal thin films.Then,AZO film precursor is spin-coated on the substrates.The effects of metal fine particles in the AZO films are evaluated by the changes of electrical conductivity and optical transmittance of the composite films.……